Z-axis 10nm stage FS-1005PZ/1010PZ
【Lifting Stage】A positioning stage with built-in linear encoder that offers high resolution of 10nm, excellent positioning repeatability, and strong position retention after positioning.
This is a high-resolution positioning stage for the Z-axis equipped with an optical linear encoder. It achieves a resolution of "10nm" with a stroke of "5mm" or "10mm." Thanks to its unique design, it minimizes changes in the tilt of the table surface, which is common in Z-axis applications. With our in-house developed linear scale and proprietary feedback control circuit, it offers high resolution, excellent positioning repeatability, and position holding capability after positioning. (*1) In combination with the feedback stage controller FC-511.
- Company：シグマ光機
- Price：Other
